On-chip array of thermoelectric Peltier microcoolers

Array of Thermoelectric Coolers for On-Chip Thermal Management

Site-specific on-demand cooling of hot spots in microprocessors can reduce peak temperature and achieve a more uniform thermal profile on chip, thereby improve chip performance and increase the processor’s life time. An array of thermoelectric coolers (TECs) integrated inside an electronic package has the potential to provide such efficient cooling of hot spots on chip. This paper analyzes the ...

Analytical modeling of silicon thermoelectric microcooler

Due to its inherently favorable properties, doped single-crystal silicon has potential application as an on-chip thermoelectric microcooler for advanced integrated circuits. In this paper, an analytical thermal model for silicon microcooler, which couples Peltier cooling with heat conduction and heat generation in the silicon substrate, and which includes heat conduction and heat generation in ...

Thermoreflectance imaging of sub 100 ns pulsed cooling in high-speed thermoelectric microcoolers

On-Chip Sensing of Thermoelectric Thin Film’s Merit

Thermoelectric thin films have been widely explored for thermal-to-electrical energy conversion or solid-state cooling, because they can remove heat from integrated circuit (IC) chips or micro-electromechanical systems (MEMS) devices without involving any moving mechanical parts. In this paper, we report using silicon diode-based temperature sensors and specific thermoelectric devices to charac...

On - Chip Thermoelectric Cooling of Semiconductor Hot Spot

Title of Dissertation: On-Chip Thermoelectric Cooling of Semiconductor Hot Spot Peng Wang, Doctor of Philosophy, 2007 Directed By: Professor Avram Bar-Cohen Assistant Professor Bao Yang Department of Mechanical Engineering The Moore’s Law progression in semiconductor technology, including shrinking feature size, increasing transistor density, and faster circuit speeds, is leading to increasing ...